Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas

出版年份 2012 全文链接

标题

Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas

作者

关键词

-

出版物

JOURNAL OF PHYSICS D-APPLIED PHYSICS

Volume 45, Issue 30, Pages 305203

出版商

IOP Publishing

发表日期

2012-07-10

DOI

10.1088/0022-3727/45/30/305203

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