The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges
出版年份 2011 全文链接
标题
The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 20, Issue 1, Pages 015017
出版商
IOP Publishing
发表日期
2011-01-25
DOI
10.1088/0963-0252/20/1/015017
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges
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