Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges
出版年份 2013 全文链接
标题
Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 102, Issue 15, Pages 154104
出版商
AIP Publishing
发表日期
2013-04-18
DOI
10.1063/1.4802241
参考文献
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