On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

标题
On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 16, Pages 165202
出版商
IOP Publishing
发表日期
2008-07-24
DOI
10.1088/0022-3727/41/16/165202

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