Excitation dynamics in electrically asymmetric capacitively coupled radio frequency discharges: experiment, simulation, and model

标题
Excitation dynamics in electrically asymmetric capacitively coupled radio frequency discharges: experiment, simulation, and model
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 19, Issue 4, Pages 045028
出版商
IOP Publishing
发表日期
2010-07-24
DOI
10.1088/0963-0252/19/4/045028

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