Influence of inhomogeneous magnetic field on the characteristics of very high frequency capacitively coupled plasmas

标题
Influence of inhomogeneous magnetic field on the characteristics of very high frequency capacitively coupled plasmas
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 5, Pages 053302
出版商
AIP Publishing
发表日期
2010-03-04
DOI
10.1063/1.3296349

向作者/读者发起求助以获取更多资源

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now