The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas

Coupling effects in inductive discharges with radio frequency substrate biasing

(2012) J. Schulze et al.   APPLIED PHYSICS LETTERS

Making a geometrically asymmetric capacitive rf discharge electrically symmetric

(2011) Julian Schulze et al.   APPLIED PHYSICS LETTERS

Fine-sorting one-dimensional particle-in-cell algorithm with Monte-Carlo collisions on a graphics processing unit

(2011) Philipp Mertmann et al.   COMPUTER PHYSICS COMMUNICATIONS

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

(2011) E Schüngel et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Power absorption in electrically asymmetric dual frequency capacitive radio frequency discharges

(2011) E. Schüngel et al.   PHYSICS OF PLASMAS

Secondary electrons in dual-frequency capacitive radio frequency discharges

(2011) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

(2011) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Theoretical and experimental study of ion flux formation in an asymmetric radio-frequency capacitive discharge

(2011) I V Schweigert et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

The electrical asymmetry effect in capacitively coupled radio-frequency discharges

(2011) U Czarnetzki et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges

(2010) Z. Donkó et al.   APPLIED PHYSICS LETTERS

Charge dynamics in capacitively coupled radio frequency discharges

(2010) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

(2010) Erik V Johnson et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

(2010) D Ziegler et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Effect of the resonant growth of harmonics on the electron density in capacitively coupled plasma

(2009) Yohei Yamazawa   APPLIED PHYSICS LETTERS

Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges

(2009) Z. Donkó et al.   APPLIED PHYSICS LETTERS

Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model

(2009) J. Schulze et al.   JOURNAL OF APPLIED PHYSICS

The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux

(2009) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Temporal structure of electron heating in asymmetric single-frequency and dual-frequency capacitive discharges

(2009) D. Ziegler et al.   PHYSICS OF PLASMAS

Power dynamics in a low pressure capacitively coupled plasma discharge

(2009) Shahid Rauf et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Stochastic heating in asymmetric capacitively coupled RF discharges

(2008) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

(2008) Brian G Heil et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect

(2008) Z Donkó et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach

(2008) T. Mussenbrock et al.   PHYSICAL REVIEW LETTERS

Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc/rf sources

(2008) Wei Jiang et al.   PHYSICS OF PLASMAS

Nonlinear dynamics of dual frequency capacitive discharges: a global model matched to an experiment

(2008) Dennis Ziegler et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Skin effect in a small symmetrically driven capacitive discharge

(2008) Thomas Mussenbrock et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode

(2008) D. Gahan et al.   REVIEW OF SCIENTIFIC INSTRUMENTS