Study on the size effect in Hf0.5Zr0.5O2 films thinner than 8 nm before and after wake-up field cycling

Title
Study on the size effect in Hf0.5Zr0.5O2 films thinner than 8 nm before and after wake-up field cycling
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 107, Issue 19, Pages 192907
Publisher
AIP Publishing
Online
2015-11-13
DOI
10.1063/1.4935588

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