Ferroelectricity in undoped-HfO2 thin films induced by deposition temperature control during atomic layer deposition
出版年份 2016 全文链接
标题
Ferroelectricity in undoped-HfO2 thin films induced by deposition temperature control during atomic layer deposition
作者
关键词
-
出版物
Journal of Materials Chemistry C
Volume 4, Issue 28, Pages 6864-6872
出版商
Royal Society of Chemistry (RSC)
发表日期
2016-06-17
DOI
10.1039/c6tc02003h
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