Optimizing Post-Metal Annealing Temperature Considering Different Resistive Switching Mechanisms in Ferroelectric Tunnel Junction
Published 2023 View Full Article
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Title
Optimizing Post-Metal Annealing Temperature Considering Different Resistive Switching Mechanisms in Ferroelectric Tunnel Junction
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 44, Issue 6, Pages 935-938
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2023-04-18
DOI
10.1109/led.2023.3267771
References
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