Low‐Temperature Atomic Layer Deposition of High‐ k SbO x for Thin Film Transistors
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Title
Low‐Temperature Atomic Layer Deposition of High‐
k
SbO
x
for Thin Film Transistors
Authors
Keywords
-
Journal
Advanced Electronic Materials
Volume -, Issue -, Pages 2101334
Publisher
Wiley
Online
2022-03-04
DOI
10.1002/aelm.202101334
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- (2020) Kuankuan Lu et al. IEEE ELECTRON DEVICE LETTERS
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- (2020) Ao Liu et al. ADVANCED FUNCTIONAL MATERIALS
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- Recent Progress in Photonic Processing of Metal‐Oxide Transistors
- (2019) Emre Yarali et al. ADVANCED FUNCTIONAL MATERIALS
- Two-dimensional inorganic molecular crystals
- (2019) Wei Han et al. Nature Communications
- Solution Processed Metal Oxide High-κ Dielectrics for Emerging Transistors and Circuits
- (2018) Ao Liu et al. ADVANCED MATERIALS
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- Review Article: Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development
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- Solution-processed inorganic p-channel transistors: Recent advances and perspectives
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- Facile synthesis and photoelectrochemical characterization of Sb 2 O 3 nanoprism arrays
- (2017) Ying Wang et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
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- The effects of process temperature on the work function modulation of ALD HfO 2 MOS device with plasma enhanced ALD TiN metal gate using TDMAT precursor
- (2017) Young Jin Kim et al. MICROELECTRONIC ENGINEERING
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- (2016) Andre Zeumault et al. ADVANCED FUNCTIONAL MATERIALS
- Performance enhancement in InZnO thin-film transistors with compounded ZrO 2 –Al 2 O 3 nanolaminate as gate insulators
- (2016) Jianhua Zhang et al. CERAMICS INTERNATIONAL
- Solid-state chemistry of glassy antimony oxides
- (2015) Chang-Eun Kim et al. Journal of Materials Chemistry C
- Substrate Biasing Effect on the Physical Properties of Reactive RF-Magnetron-Sputtered Aluminum Oxide Dielectric Films on ITO Glasses
- (2014) Ling Yan Liang et al. ACS Applied Materials & Interfaces
- Gate Capacitance-Dependent Field-Effect Mobility in Solution-Processed Oxide Semiconductor Thin-Film Transistors
- (2014) Eungkyu Lee et al. ADVANCED FUNCTIONAL MATERIALS
- Improved performance of InGaZnO thin-film transistors with Ta2O5/Al2O3 stack deposited using pulsed laser deposition
- (2014) G.Z. Geng et al. CURRENT APPLIED PHYSICS
- Time-of-flight – Energy spectrometer for elemental depth profiling – Jyväskylä design
- (2014) Mikko Laitinen et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
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- (2014) K. Arstila et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
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- (2013) Laura Nyns et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
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- (2012) Jee Ho Park et al. ACS Applied Materials & Interfaces
- Sb2O3 anode buffer induced morphology improvement in small molecule organic solar cells
- (2011) Lijian Zuo et al. APPLIED PHYSICS LETTERS
- High-k (k=30) amorphous hafnium oxide films from high rate room temperature deposition
- (2011) Flora M. Li et al. APPLIED PHYSICS LETTERS
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- (2010) R. Sarma et al. BRAZILIAN JOURNAL OF PHYSICS
- Atomic Layer Deposition of Antimony Oxide and Antimony Sulfide
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- (2008) Y Zhou et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
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