Low‐Temperature Atomic Layer Deposition of High‐ k SbO x for Thin Film Transistors

Title
Low‐Temperature Atomic Layer Deposition of High‐ k SbO x for Thin Film Transistors
Authors
Keywords
-
Journal
Advanced Electronic Materials
Volume -, Issue -, Pages 2101334
Publisher
Wiley
Online
2022-03-04
DOI
10.1002/aelm.202101334

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