Improved performance of InGaZnO thin-film transistors with Ta2O5/Al2O3 stack deposited using pulsed laser deposition

Published 2014 View Full Article

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Title
Improved performance of InGaZnO thin-film transistors with Ta2O5/Al2O3 stack deposited using pulsed laser deposition
Authors
Keywords
-
Journal
CURRENT APPLIED PHYSICS
Volume 14, Issue -, Pages S2-S6
Publisher
Elsevier BV
Online
2014-01-04
DOI
10.1016/j.cap.2013.12.006

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