标题
Low‐Temperature Atomic Layer Deposition of High‐
k
SbO
x
for Thin Film Transistors
作者
关键词
-
出版物
Advanced Electronic Materials
Volume -, Issue -, Pages 2101334
出版商
Wiley
发表日期
2022-03-04
DOI
10.1002/aelm.202101334
参考文献
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