Review Article: Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development

Published 2018 View Full Article

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Title
Review Article: Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 36, Issue 6, Pages 060801
Publisher
American Vacuum Society
Online
2018-11-02
DOI
10.1116/1.5047237

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