Wake-up and fatigue mechanisms in ferroelectric Hf0.5Zr0.5O2 films with symmetric RuO2 electrodes

Title
Wake-up and fatigue mechanisms in ferroelectric Hf0.5Zr0.5O2 films with symmetric RuO2 electrodes
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 130, Issue 13, Pages 134101
Publisher
AIP Publishing
Online
2021-10-04
DOI
10.1063/5.0064145

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