Wake-up and fatigue mechanisms in ferroelectric Hf0.5Zr0.5O2 films with symmetric RuO2 electrodes
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Title
Wake-up and fatigue mechanisms in ferroelectric Hf0.5Zr0.5O2 films with symmetric RuO2 electrodes
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 130, Issue 13, Pages 134101
Publisher
AIP Publishing
Online
2021-10-04
DOI
10.1063/5.0064145
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Note: Only part of the references are listed.- Unexpectedly large remanent polarization of Hf0.5Zr0.5O2 metal–ferroelectric–metal capacitor fabricated without breaking vacuum
- (2021) Younghwan Lee et al. APPLIED PHYSICS LETTERS
- Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf1-xZrxO2 thin films
- (2021) Shelby S. Fields et al. APPLIED PHYSICS LETTERS
- Chemical Stability of IrO 2 Top Electrodes in Ferroelectric Hf 0.5 Zr 0.5 O 2 ‐based MIM Structures: The Impact of Annealing Gas
- (2021) Thomas Szyjka et al. Physica Status Solidi-Rapid Research Letters
- Impact of Iridium Oxide Electrodes on the Ferroelectric Phase of Thin Hf 0.5 Zr 0.5 O 2 Films
- (2021) Terence Mittmann et al. Physica Status Solidi-Rapid Research Letters
- Metal Nitride Electrode Stress and Chemistry Effects on Phase and Polarization Response in Ferroelectric Hf 0.5 Zr 0.5 O 2 Thin Films
- (2021) Shelby S. Fields et al. Advanced Materials Interfaces
- Physical chemistry of the TiN/Hf0.5Zr0.5O2 interface
- (2020) W. Hamouda et al. JOURNAL OF APPLIED PHYSICS
- Phase-Exchange-Driven Wake-Up and Fatigue in Ferroelectric Hafnium Zirconium Oxide Films
- (2020) Shelby S. Fields et al. ACS Applied Materials & Interfaces
- Compositional dependence of crystallization temperatures and phase evolution in hafnia-zirconia (HfxZr1−x)O2 thin films
- (2020) H. Alex Hsain et al. APPLIED PHYSICS LETTERS
- Enhanced ferroelectricity in ultrathin films grown directly on silicon
- (2020) Suraj S. Cheema et al. NATURE
- Interface chemistry of pristine TiN/La: Hf 0.5 Zr 0.5 O 2 capacitors
- (2020) W. Hamouda et al. APPLIED PHYSICS LETTERS
- Crystalline Phase-Controlled High-Quality Hafnia Ferroelectric With RuO₂ Electrode
- (2020) Youngin Goh et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Compositional dependence of linear and nonlinear optical response in crystalline hafnium zirconium oxide thin films
- (2020) Jon F. Ihlefeld et al. JOURNAL OF APPLIED PHYSICS
- Impact of oxygen vacancy on the ferroelectric properties of lanthanum-doped hafnium oxide
- (2020) Damir R. Islamov et al. APPLIED PHYSICS LETTERS
- Enhanced Second Harmonic Generation from Ferroelectric HfO2-Based Hybrid Metasurfaces
- (2019) Jun Qin et al. ACS Nano
- Mitigating wakeup effect and improving endurance of ferroelectric HfO2-ZrO2 thin films by careful La-doping
- (2019) Maxim G. Kozodaev et al. JOURNAL OF APPLIED PHYSICS
- Origin of Ferroelectric Phase in Undoped HfO 2 Films Deposited by Sputtering
- (2019) Terence Mittmann et al. Advanced Materials Interfaces
- On the Origin of the Large Remanent Polarization in La:HfO 2
- (2019) Tony Schenk et al. Advanced Electronic Materials
- Lanthanum-Doped Hafnium Oxide: A Robust Ferroelectric Material
- (2018) Uwe Schroeder et al. INORGANIC CHEMISTRY
- Frequency domain analysis of pyroelectric response in silicon-doped hafnium oxide (HfO2) thin films
- (2018) C. Mart et al. APPLIED PHYSICS LETTERS
- Low-voltage operation and high endurance of 5-nm ferroelectric Hf0.5Zr0.5O2 capacitors
- (2018) Si Joon Kim et al. APPLIED PHYSICS LETTERS
- Thickness scaling of pyroelectric response in thin ferroelectric Hf1−xZrxO2 films
- (2018) Sean W. Smith et al. APPLIED PHYSICS LETTERS
- Pyroelectric and electrocaloric effects in ferroelectric silicon-doped hafnium oxide thin films
- (2018) Shishir Pandya et al. PHYSICAL REVIEW MATERIALS
- Identification of the nature of traps involved in the field cycling of Hf0.5Zr0.5O2-based ferroelectric thin films
- (2018) Damir R. Islamov et al. ACTA MATERIALIA
- Pulse wake-up and breakdown investigation of ferroelectric yttrium doped HfO2
- (2017) S. Starschich et al. JOURNAL OF APPLIED PHYSICS
- Factors Favoring Ferroelectricity in Hafnia: A First-Principles Computational Study
- (2017) Rohit Batra et al. Journal of Physical Chemistry C
- Effect of the film thickness on the crystal structure and ferroelectric properties of (Hf 0.5 Zr 0.5 )O 2 thin films deposited on various substrates
- (2017) Takahisa Shiraishi et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- Optimizing process conditions for improved Hf 1−x Zr x O 2 ferroelectric capacitor performance
- (2017) Terence Mittmann et al. MICROELECTRONIC ENGINEERING
- Fatigue mechanism of yttrium-doped hafnium oxide ferroelectric thin films fabricated by pulsed laser deposition
- (2017) Fei Huang et al. PHYSICAL CHEMISTRY CHEMICAL PHYSICS
- Domain Pinning: Comparison of Hafnia and PZT Based Ferroelectrics
- (2017) Franz P. G. Fengler et al. Advanced Electronic Materials
- Effect of Zr Content on the Wake-Up Effect in Hf1–xZrxO2 Films
- (2016) Min Hyuk Park et al. ACS Applied Materials & Interfaces
- Physical Mechanisms behind the Field-Cycling Behavior of HfO2 -Based Ferroelectric Capacitors
- (2016) Milan Pešić et al. ADVANCED FUNCTIONAL MATERIALS
- Impact of mechanical stress on ferroelectricity in (Hf0.5Zr0.5)O2 thin films
- (2016) Takahisa Shiraishi et al. APPLIED PHYSICS LETTERS
- Evidence for oxygen vacancies movement during wake-up in ferroelectric hafnium oxide
- (2016) S. Starschich et al. APPLIED PHYSICS LETTERS
- Domain-wall conduction in ferroelectric BiFeO3 controlled by accumulation of charged defects
- (2016) Tadej Rojac et al. NATURE MATERIALS
- Structural Changes Underlying Field-Cycling Phenomena in Ferroelectric HfO2Thin Films
- (2016) Everett D. Grimley et al. Advanced Electronic Materials
- On the structural origins of ferroelectricity in HfO2 thin films
- (2015) Xiahan Sang et al. APPLIED PHYSICS LETTERS
- Toward a multifunctional monolithic device based on pyroelectricity and the electrocaloric effect of thin antiferroelectric Hf x Zr 1−x O 2 films
- (2015) Min Hyuk Park et al. Nano Energy
- Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2films on TiN bottom and TiN or RuO2top electrodes
- (2014) Min Hyuk Park et al. Physica Status Solidi-Rapid Research Letters
- Wake-up effects in Si-doped hafnium oxide ferroelectric thin films
- (2013) Dayu Zhou et al. APPLIED PHYSICS LETTERS
- Evolution of phases and ferroelectric properties of thin Hf0.5Zr0.5O2 films according to the thickness and annealing temperature
- (2013) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- Ten-Nanometer Ferroelectric $\hbox{Si:HfO}_{2}$ Films for Next-Generation FRAM Capacitors
- (2012) Stefan Mueller et al. IEEE ELECTRON DEVICE LETTERS
- Ferroelectricity in Simple Binary ZrO2 and HfO2
- (2012) Johannes Müller et al. NANO LETTERS
- Measurement of oxygen diffusion in nanometer scale HfO2 gate dielectric films
- (2011) Sufi Zafar et al. APPLIED PHYSICS LETTERS
- Ferroelectricity in hafnium oxide thin films
- (2011) T. S. Böscke et al. APPLIED PHYSICS LETTERS
- Ferroelectric Zr0.5Hf0.5O2thin films for nonvolatile memory applications
- (2011) J. Müller et al. APPLIED PHYSICS LETTERS
- Ferroelectricity in yttrium-doped hafnium oxide
- (2011) J. Müller et al. JOURNAL OF APPLIED PHYSICS
- Gate Oxides Beyond SiO2
- (2011) Darrell G. Schlom et al. MRS BULLETIN
- Strong ferroelectric domain-wall pinning in BiFeO3 ceramics
- (2010) Tadej Rojac et al. JOURNAL OF APPLIED PHYSICS
- Conduction at domain walls in oxide multiferroics
- (2009) J. Seidel et al. NATURE MATERIALS
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