Optimizing process conditions for improved Hf 1−x Zr x O 2 ferroelectric capacitor performance

Authors

Keywords

Ferroelectrics, Hafnium oxide, ALD process

Journal

Volume 178, Issue -, Pages 48-51

Publisher

Elsevier BV

Online

2017-05-03

DOI

10.1016/j.mee.2017.04.031

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