Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf1-xZrxO2 thin films

Title
Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf1-xZrxO2 thin films
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 118, Issue 10, Pages 102901
Publisher
AIP Publishing
Online
2021-03-08
DOI
10.1063/5.0044702

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