Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf1-xZrxO2 thin films
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Title
Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf1-xZrxO2 thin films
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 118, Issue 10, Pages 102901
Publisher
AIP Publishing
Online
2021-03-08
DOI
10.1063/5.0044702
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- (2017) Takahisa Shiraishi et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
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- GSAS-II: the genesis of a modern open-source all purpose crystallography software package
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- Elastic properties of cubic, tetragonal and monoclinic ZrO2 from first-principles calculations
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- Two-tint pump-probe measurements using a femtosecond laser oscillator and sharp-edged optical filters
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