Thickness scaling of pyroelectric response in thin ferroelectric Hf1−xZrxO2 films
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Title
Thickness scaling of pyroelectric response in thin ferroelectric Hf1−xZrxO2 films
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 113, Issue 18, Pages 182904
Publisher
AIP Publishing
Online
2018-11-02
DOI
10.1063/1.5045635
References
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Related references
Note: Only part of the references are listed.- Pyroelectricity of silicon-doped hafnium oxide thin films
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