Crystalline Phase-Controlled High-Quality Hafnia Ferroelectric With RuO₂ Electrode

Published 2020 View Full Article

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Title
Crystalline Phase-Controlled High-Quality Hafnia Ferroelectric With RuO₂ Electrode
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 67, Issue 8, Pages 3431-3434
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-06-20
DOI
10.1109/ted.2020.2998444

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