Interface chemistry of pristine TiN/La: Hf 0.5 Zr 0.5 O 2 capacitors

Title
Interface chemistry of pristine TiN/La: Hf 0.5 Zr 0.5 O 2 capacitors
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 116, Issue 25, Pages 252903
Publisher
AIP Publishing
Online
2020-06-26
DOI
10.1063/5.0012595

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