A review on the statics and dynamics of electrically actuated nano and micro structures
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Title
A review on the statics and dynamics of electrically actuated nano and micro structures
Authors
Keywords
NEMS, MEMS, Nanobeam, Nanoplate, Nanoshell, Microbeam, Microplate, Microshell, Electrically actuated, Electrostatic, Electrodynamic
Journal
INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS
Volume 129, Issue -, Pages 103658
Publisher
Elsevier BV
Online
2020-12-04
DOI
10.1016/j.ijnonlinmec.2020.103658
References
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