Post-release deformation and curvature correction of an electrothermally actuated MEMS bilayer platform

Published 2019 View Full Article

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Title
Post-release deformation and curvature correction of an electrothermally actuated MEMS bilayer platform
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 221, Issue -, Pages 111192
Publisher
Elsevier BV
Online
2019-11-26
DOI
10.1016/j.mee.2019.111192

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