An analytical study for nonlinear free and forced vibration of electrostatically actuated MEMS resonators
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Title
An analytical study for nonlinear free and forced vibration of electrostatically actuated MEMS resonators
Authors
Keywords
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Journal
International Journal of Structural Stability and Dynamics
Volume -, Issue -, Pages -
Publisher
World Scientific Pub Co Pte Lt
Online
2019-03-11
DOI
10.1142/s021945541950072x
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