Electrostatic pull-in instability in MEMS/NEMS: A review

Published 2014 View Full Article

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Title
Electrostatic pull-in instability in MEMS/NEMS: A review
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 214, Issue -, Pages 187-218
Publisher
Elsevier BV
Online
2014-05-09
DOI
10.1016/j.sna.2014.04.025

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