An Experimental and Theoretical Investigation of Dynamic Pull-In in MEMS Resonators Actuated Electrostatically

Published 2010 View Full Article

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Title
An Experimental and Theoretical Investigation of Dynamic Pull-In in MEMS Resonators Actuated Electrostatically
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 19, Issue 4, Pages 794-806
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-06-15
DOI
10.1109/jmems.2010.2047846

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