Predicting strength distributions of MEMS structures using flaw size and spatial density
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Title
Predicting strength distributions of MEMS structures using flaw size and spatial density
Authors
Keywords
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Journal
Microsystems & Nanoengineering
Volume 5, Issue 1, Pages -
Publisher
Springer Science and Business Media LLC
Online
2019-11-04
DOI
10.1038/s41378-019-0093-y
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