The effect of capillary and intermolecular forces on instability of the electrostatically actuated microbeam with T-shaped paddle in the presence of fringing field
The effect of capillary and intermolecular forces on instability of the electrostatically actuated microbeam with T-shaped paddle in the presence of fringing field
Authors
Keywords
Microbeam, Pull in instability, Capillary force, Casimir force, Van der waals force, Primary resonance
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