Electrically actuated MEMS resonators: Effects of fringing field and viscoelasticity

Published 2017 View Full Article

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Title
Electrically actuated MEMS resonators: Effects of fringing field and viscoelasticity
Authors
Keywords
MEMS resonator, Fringing field effect, Residual axial load, Viscoelasticity, Kelvin-Voigt model, Modified couple stress theory
Journal
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
Volume 95, Issue -, Pages 345-362
Publisher
Elsevier BV
Online
2017-04-07
DOI
10.1016/j.ymssp.2017.03.018

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