Effect of van der Waals force on pull-in voltage, frequency tuning and frequency stability of NEMS devices
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Title
Effect of van der Waals force on pull-in voltage, frequency tuning and frequency stability of NEMS devices
Authors
Keywords
Axial Force, Reduce Order Model, Casimir Force, Deflected State, Fixed Electrode
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 23, Issue 5, Pages 1255-1267
Publisher
Springer Nature
Online
2016-02-19
DOI
10.1007/s00542-016-2855-x
References
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