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Title
Nonlinear thermo-mechanical behaviour of MEMS resonators
Authors
Keywords
Static Deflection, Modify Couple Stress Theory, Deformable Electrode, Deflected Configuration, Small Excitation Frequency
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 23, Issue 12, Pages 5303-5315
Publisher
Springer Nature
Online
2017-05-04
DOI
10.1007/s00542-017-3381-1
References
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