Nonlinear behaviour of electrically actuated microplate-based MEMS resonators

Published 2018 View Full Article

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Title
Nonlinear behaviour of electrically actuated microplate-based MEMS resonators
Authors
Keywords
MEMS resonator, Electrically actuated, Deformable electrode, Pull-in
Journal
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
Volume 109, Issue -, Pages 220-234
Publisher
Elsevier BV
Online
2018-03-09
DOI
10.1016/j.ymssp.2017.11.043

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