Static response and free vibration of MEMS arches assuming out-of-plane actuation pattern

Published 2019 View Full Article

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Title
Static response and free vibration of MEMS arches assuming out-of-plane actuation pattern
Authors
Keywords
MEMS, Micro-arch, Actuator, Electrostatic, Non-parallel electrodes, Snap-through instability
Journal
INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-01-09
DOI
10.1016/j.ijnonlinmec.2018.12.011

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