A review on the statics and dynamics of electrically actuated nano and micro structures
出版年份 2020 全文链接
标题
A review on the statics and dynamics of electrically actuated nano and micro structures
作者
关键词
NEMS, MEMS, Nanobeam, Nanoplate, Nanoshell, Microbeam, Microplate, Microshell, Electrically actuated, Electrostatic, Electrodynamic
出版物
INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS
Volume 129, Issue -, Pages 103658
出版商
Elsevier BV
发表日期
2020-12-04
DOI
10.1016/j.ijnonlinmec.2020.103658
参考文献
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