Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms

Published 2013 View Full Article

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Title
Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms
Authors
Keywords
-
Journal
PLASMA PHYSICS AND CONTROLLED FUSION
Volume 55, Issue 12, Pages 124002
Publisher
IOP Publishing
Online
2013-11-28
DOI
10.1088/0741-3335/55/12/124002

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