Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model

Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges

(2009) Z. Donkó et al.   APPLIED PHYSICS LETTERS

The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux

(2009) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Modeling of Capacitively Coupled RF Plasmas in H2

(2009) Savino Longo et al.   Plasma Processes and Polymers

Different modes of electron heating in dual-frequency capacitively coupled radio frequency discharges

(2009) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

The role of the relative voltage and phase for frequency coupling in a dual-frequency capacitively coupled plasma

(2008) D. O’Connell et al.   APPLIED PHYSICS LETTERS

Electron Beams in Capacitively Coupled Radio-Frequency Discharges

(2008) J. Schulze et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Numerical Modeling of Electron Beams Accelerated by the Radio Frequency Boundary Sheath

(2008) Brian G. Heil et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

Electric field reversals in the sheath region of capacitively coupled radio frequency discharges at different pressures

(2008) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Electron beams in asymmetric capacitively coupled radio frequency discharges at low pressures

(2008) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Stochastic heating in asymmetric capacitively coupled RF discharges

(2008) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

(2008) Brian G Heil et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect

(2008) Z Donkó et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS