Secondary electron induced asymmetry in capacitively coupled plasmas

Published 2013 View Full Article

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Title
Secondary electron induced asymmetry in capacitively coupled plasmas
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 13, Pages 135201
Publisher
IOP Publishing
Online
2013-02-26
DOI
10.1088/0022-3727/46/13/135201

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