Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms

Published 2016 View Full Article

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Title
Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 25, Issue 2, Pages 025006
Publisher
IOP Publishing
Online
2016-02-08
DOI
10.1088/0963-0252/25/2/025006

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