The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux

Published 2009 View Full Article

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Title
The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 9, Pages 092005
Publisher
IOP Publishing
Online
2009-04-16
DOI
10.1088/0022-3727/42/9/092005
References
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