PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect

Title
PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 2, Pages 025205
Publisher
IOP Publishing
Online
2008-12-19
DOI
10.1088/0022-3727/42/2/025205

Ask authors/readers for more resources

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now