Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas

Published 2012 View Full Article

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Title
Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 30, Pages 305203
Publisher
IOP Publishing
Online
2012-07-10
DOI
10.1088/0022-3727/45/30/305203

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