The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas

Secondary electron induced asymmetry in capacitively coupled plasmas

(2013) T Lafleur et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma

(2012) B. Bora et al.   APPLIED PHYSICS LETTERS

Coupling effects in inductive discharges with radio frequency substrate biasing

(2012) J. Schulze et al.   APPLIED PHYSICS LETTERS

Microcrystalline silicon solar cells deposited using a plasma process excited by tailored voltage waveforms

(2012) E. V. Johnson et al.   APPLIED PHYSICS LETTERS

Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas

(2012) Quan-Zhi Zhang et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

The effect of the driving frequencies on the electrical asymmetry of dual-frequency capacitively coupled plasmas

(2012) Ihor Korolov et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

(2012) Z Donkó et al.   PLASMA PHYSICS AND CONTROLLED FUSION

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

(2011) E Schüngel et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Electron heating and the electrical asymmetry effect in dual-frequency capacitive CF4discharges

(2011) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Secondary electrons in dual-frequency capacitive radio frequency discharges

(2011) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

(2011) J Schulze et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges

(2010) Z. Donkó et al.   APPLIED PHYSICS LETTERS

Charge dynamics in capacitively coupled radio frequency discharges

(2010) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Fundamental aspects of substrate biasing: ion velocity distributions and nonlinear effects

(2010) Tim Baloniak et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model

(2009) J. Schulze et al.   JOURNAL OF APPLIED PHYSICS

The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux

(2009) J Schulze et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Modeling of Capacitively Coupled RF Plasmas in H2

(2009) Savino Longo et al.   Plasma Processes and Polymers

Numerical Modeling of Electron Beams Accelerated by the Radio Frequency Boundary Sheath

(2008) Brian G. Heil et al.   IEEE TRANSACTIONS ON PLASMA SCIENCE

On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

(2008) Brian G Heil et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect

(2008) Z Donkó et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Secondary electrons in rf and dc/rf capacitive discharges

(2008) E Kawamura et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY