Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges
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Title
Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 15, Pages 154104
Publisher
AIP Publishing
Online
2013-04-18
DOI
10.1063/1.4802241
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