Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

Title
Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 24, Issue 1, Pages 015021
Publisher
IOP Publishing
Online
2014-12-23
DOI
10.1088/0963-0252/24/1/015021

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