A Review on Sustainable Manufacturing of Ceramic-Based Thin Films by Chemical Vapor Deposition (CVD): Reactions Kinetics and the Deposition Mechanisms
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Title
A Review on Sustainable Manufacturing of Ceramic-Based Thin Films by Chemical Vapor Deposition (CVD): Reactions Kinetics and the Deposition Mechanisms
Authors
Keywords
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Journal
Coatings
Volume 13, Issue 1, Pages 188
Publisher
MDPI AG
Online
2023-01-16
DOI
10.3390/coatings13010188
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