Hot wire chemical vapor deposition for silicon photonics: An emerging industrial application opportunity

Published 2019 View Full Article

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Title
Hot wire chemical vapor deposition for silicon photonics: An emerging industrial application opportunity
Authors
Keywords
Silicon photonics, Hot wire chemical vapor deposition, Silicon nitride, Mach-Zehnder interformeter, Multimode interferometer, Silicon photonics waveguides
Journal
THIN SOLID FILMS
Volume 676, Issue -, Pages 26-30
Publisher
Elsevier BV
Online
2019-02-28
DOI
10.1016/j.tsf.2019.02.048

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