Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS
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Title
Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS
Authors
Keywords
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Journal
Micromachines
Volume 11, Issue 9, Pages 799
Publisher
MDPI AG
Online
2020-08-24
DOI
10.3390/mi11090799
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