Highly self-oriented growth of (020) and (002) monoclinic HfO2 thick films using laser chemical vapor deposition

Published 2019 View Full Article

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Title
Highly self-oriented growth of (020) and (002) monoclinic HfO2 thick films using laser chemical vapor deposition
Authors
Keywords
Monoclinic HfO, 2, Chemical vapor deposition, Oriented growth, Films
Journal
CERAMICS INTERNATIONAL
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-09-18
DOI
10.1016/j.ceramint.2019.09.156

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