Low-temperature SiO2 film coatings onto Cu particles using the polygonal barrel-plasma chemical vapor deposition method
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Title
Low-temperature SiO2 film coatings onto Cu particles using the polygonal barrel-plasma chemical vapor deposition method
Authors
Keywords
Polygonal barrel-plasma chemical vapor deposition (PB-PCVD) system, Particle surface modification, Ceramic coating, SiO, 2, film, Dry process
Journal
APPLIED SURFACE SCIENCE
Volume -, Issue -, Pages 152646
Publisher
Elsevier BV
Online
2022-01-29
DOI
10.1016/j.apsusc.2022.152646
References
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