A Review on Sustainable Manufacturing of Ceramic-Based Thin Films by Chemical Vapor Deposition (CVD): Reactions Kinetics and the Deposition Mechanisms
出版年份 2023 全文链接
标题
A Review on Sustainable Manufacturing of Ceramic-Based Thin Films by Chemical Vapor Deposition (CVD): Reactions Kinetics and the Deposition Mechanisms
作者
关键词
-
出版物
Coatings
Volume 13, Issue 1, Pages 188
出版商
MDPI AG
发表日期
2023-01-16
DOI
10.3390/coatings13010188
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