Preparation of ZrC-SiC composite coatings by chemical vapor deposition and study of co-deposition mechanism

Title
Preparation of ZrC-SiC composite coatings by chemical vapor deposition and study of co-deposition mechanism
Authors
Keywords
Chemical vapor deposition (CVD), Zirconium carbide, Silicon carbide, Composite coatings, Co-deposition mechanism
Journal
Publisher
Elsevier BV
Online
2019-07-09
DOI
10.1016/j.jmst.2019.07.005

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